Optical characterization of fluorine doped tin oxide fto. Ethanol sensing properties of f doped zno thin films by. Hegazy et almodification of fluorinedoped tin oxide surface. Dopants used were antimony tri chloride sbcl 3 for antimony doped tin oxide ato films, and ammonium fluoride nh 4 f for. Fluorine doping increased the degree of crystallinity and preferred orientation as well as the figure of merit 23. Performance of transparent conducting fluorinedoped tin. Structural, optical and electrical properties were studied. Syntheses and characterization of fluorine doped tin oxide using spray pyrolysis technique. Pdf electrical and optical properties of fluorine doped. Films with the lowest electrical resistivity were deposited using an aqueous solution of zinc acetate at 490 c resulting in improved crystallinity, while. The purpose of this research is aimed at finding an optimum.
Pdf fabrication of fluorine doped tin oxide fto thin. Nanomechanical and material properties of fluorinedoped. Fluorine doped tin oxide fto thin films were prepared by chemical spray pyrolysis method on glass substrates for different substrate temperatures and their structural, optical and electrical studies were investigated. Optoelectronic properties of fluorine doped tin oxide. For this purpose, undoped and fluorinedoped tinoxide sno 2 thin films were prepared by solgel dip coating process.
The inset in b is a schematic of the ultrasonic spray pyrolysis usp system. Paper open access related content preliminary study in. The spray pyrolysis technique was employed to deposit the fluorine doped tin oxide thin films. Fluorine doped tin oxide fto film is one of the most promising transparent conducting materials. Undoped and nitrogendoped titanium dioxide tio2 thin films of 400 nm thick deposited by spray pyrolysis were structurally and optically characterized.
The oxygen deficiency and dopant presence into films increase the electric conductivity of them. Influence of atomizing voltage on fluorine doped tin oxide. The effect of substrate heating temperature upon spray pyrolysis. Among the commercially common transparent conducting oxides tcos are fluorinedoped tin oxide fto and indiumdoped tin oxide ito, neither of which meets all criteria for the optimal tco. Low temperature synthesis of fluorinedoped tin oxide transparent conducting thin film by spray pyrolysis deposition.
Preliminary study in fabricating fluorinedoped tin oxide by using spray pyrolysis methods to cite this article. Pdf fabrication of fluorine doped tin oxide fto thin filmsusing. Transparent conducting oxide tco is widely used for the application of flat panel display like liquid crystal displays and plasma display panel. Uvvisible spectroscopy, hall effect measurement, edx, sem and tofsims were employed to investigate the optoelectronic properties of the film. The effect of doping on the concentration and mobility of the charge carriers electrons as well as the resistivity of the films has been studied. Mohamed, fabrication of fluorine doped tin oxide fto thin films using spray pyrolysis deposition method for transparent conducting oxide, arpn journal of engineering and applied sciences jeas, vol. The films grown at the optimum substrate temperature with different doping levels have been chosen for this study. Synthesis and characterization of pure and fluorine doped. Growth and properties of fluorinedoped tin oxide films.
Improvement of transparent conducting performance on. The synthesis of fluorine doped tin oxide has been conducted under spray pyrolysis technique in which a precursor solution of sncl2. Syntheses and characterization of fluorine doped tin oxide. Optical constants such as refractive index n, extinction coefficient k and the absorption coefficient of the fto thin films were determined using spectrophotometric measurement of transmittance, absorbance and reflectance in the spectral range from 172 to 1100nm. Fluorodoped tin oxide was reported to behave as ntype semiconductor with wide band gap within 3. In the present work, undoped sno2 and fluorinedoped tin oxide fto thin films were prepared by solgel process using a solution composed of sncl2, h2o, nh4f, and ethanol mixture. Despite its superior chemical stability and being composed of abundant elements, fto suffers from high surface roughness compared to ito. In this study, highly transparent conducting fluorinedoped tin oxide fto electrodes were fabricated using the horizontal ultrasonic spray pyrolysis deposition. Fluorine doped tin oxide fto thin films were prepared at different deposition temperatures using the spray pyrolysis deposition spd technique. The effect of substrate temperature on the optical properties of the films was also investigated.
Preparation of fluorine doped tin oxide film by ultrasonic spray. Undoped, antimony doped and fluorine doped tin oxide films have been prepared by spray pyrolysis technique. The technique of solgel combined with ultrasonic spray pyrolysis gives the possibility to produce highquality largescale fto films. Spray pyrolysis on fluorine doped tin oxide fto coated glass slides nitrogen as the carrier gas. Fabrication of fluorine doped tin oxide fto thin filmsusing spray pyrolysis deposition methodfor transparent conducting oxide. Electrical and optical properties of fluorine doped tin oxide. The asprepared films are polycrystalline with a tetragonal crystal structure.
Fluorine doped tin oxide fto thin films were prepared by using amm onium fluoride nh 4f and dbtda. The fluorine concentration in the precursor solution was varied from 0 to 40 at. Mcelnea department of chemistry, the university of queensland, brisbane 4072, australia received 12 december 1994. The effects of fluorine doping rate sno 2 films properties are studied. The fluorinedoped tin oxide thin films were prepared using a modified respiratory. Tco glasses, fluorinedoped tin oxide fto has the biggest potential to be developed. Structural, optical and electrical properties of fluorine. Fluorinedoped tin oxide fto thin films were deposited on glass substrates using ultrasonic spray pyrolysis usp at a fixed. Spray pyrolysis deposition spd technique has been employed to prepare large area fluorinedoped tin oxide fto, nanocrystalline tio. Structural and electrical studies on highly conducting. Fluorinedoped tin oxide fto films were prepared at different substrate temperatures by ultrasonic spray pyrolysis technique on glass substrates. Effect of substrate temperature on fluorine doped tin. Electronic and optical properties of fluorinedoped tin.
Spray pyrolysis technique has been used to deposit fluorine doped tin oxide fto thin films. Xray diffraction xrd spectrum showed all the peaks of the crystalline sno 2. Structural studies of the films were undertaken by xray diffraction xrd. Physicochemical characteristics of fluorine doped tin. The solution was sprayed on the heated glass substrate using km 150 spray pyrolysis deposition machine. Using the fto sol, fto films are prepared by ultrasonic spray pyrolysis technique. Transparent and conductive fluorine doped tin oxide thin films fto were deposited on to thoroughly cleaned glass substrates by nebulized spray pyrolysis technique using dihydrated tin ii.
The crystal structure of fto thin films was determined through xray diffraction xrd. Xrd studies reveal that the material deposited is polycrystalline sno2 and. They are an important component in a number of electronic devices including liquidcrystal displays, oleds, touchscreens and photovoltaics. Effect of fluorine doping on the electrical and optical. Temperature dependence of fluorinedoped tin oxide films.
Thin films of undoped and fluorinedoped tin oxide have been prepared on fused silica substrates by a spray pyrolysis technique. Fluorinedoped tin oxide films by spray pyrolysis using. F fto were prepared by sol gel dip coating sgdc route method by using easily available low cost materials as we use sncl 2, 2h 2o and hf. Sno 2 films were prepared by spray pyrolysis technique on glass substrates. In order to investigate the fluorine presence, we have analyzed the composition of fto film and the formed powder in the solution during film growth. Pdf gas sensing of fluorine doped tin oxide thin films. Here we report a part of our work on development of optoelectronic device quality fluorine doped tin dioxide sno 2. Structural and optical characterization of nitrogendoped. Fabrication and characterization of spraydeposited. Physical properties of highly oriented spray deposited.
Pdf pfluorine doped tin oxide fto thin films were deposited on glass substrates by home built spray pyrolysis setup at 400 5. The fluorine concentration effect on structural, optical and electrical properties of sno2 films is investigated. Low temperature synthesis of fluorinedoped tin oxide. The prime aim of this work is to fabricate fluorine doped tin oxide thin film using a low cost manually controlled homemade spray pyrolysis system and investigate its structural, optical and electrical properties. Thin film deposition using spray pyrolysis 105 properties of zinc oxide. Fluorinedoped tin oxide fto thin films were prepared, at different substrate temperatures, using dilute precursor solutions of dinbutyltiniv diacetate 0. Effects of fsn atomic ratios on structuralmorphological, compositional, electrical, optical, and nanomechanical properties of the fto thin films were. Optical and electrical properties of fluorine doped tin. Developed spray pyrolysis reactor for fabricating fluorinedoped tin. The precursor solution was the mixture tin chloride pentahydrate solution and ammonium fluoride solution. The spray nozzle tosubstrate distance was set to about 15 cm. Pdf preparation of fluorine doped tin oxide film by. It was observed that the conductivity of the fto thin film increased with.
Among fdoped tin oxide films, the lowest resistivitiy was found to be 6. International journal of energy engineering 2012, 23. Titanium dioxide, spray pyrolysis, doping mafiadoc. A systematic optimization of the solvent and the precursor as well as the preparation parameters and their effect on structural and physical electricaloptical characteristics are. No postdeposition annealing treatments were carried out. The transparent conducting fto film gave low sheet resistance 8. Structural and optical properties of fluorine doped tin oxide thin. Investigations on the optical properties of undoped. The use of these fto plates in dyesensitized solar. Thin films of fluorinedoped sno 2 have been prepared by deposition on borosilicate glass using the spraypyrolysis technique. Our previous work on undoped spray deposited sno 2 films showed that precursor concentration is the most important process parameter controlling growth rate and structural properties, which. Spray pyrolysis deposition spd technique has been employed to prepare large area fluorine doped tin oxide fto, nanocrystalline tio. Fluorine doped tin oxide fto thin films were prepared by using ammonium fluoride nh4f and dbtda. These two solutions were mixed and finally get the fluorine doped with tin oxide.
Optical properties of these films are investigated in the entire uv. Pdf optimization of fabricating fluorinedoped tin oxide. Fluorine doped tin oxide fto coatings have been prepared using the midfrequency pulsed dc closed field unbalanced magnetron sputtering technique in an aro2 atmosphere using blends of tin oxide and tin fluoride powder formed into targets. Fluorinedoped tin oxide thin films deposition by solgel. Fluorinedoped tin oxide films by spray pyrolysis using vacuum within nozzle the water molecules provide oxygen, however the oxygen concentration is affected by the rate of cooling of the films after the spray due to the adsorption of oxygen. Preparation of fluorine doped tin oxide by a spray. Undoped, fluorine doped and antimony doped tin oxide films are prepared on quartz plates by spray pyrolysis technique. Preparation of fluoridedoped tin oxide films on sodalime. The solution then proceeds to spray pyrolysis process to produce the fto substrate. Pdf structural and optical properties of fluorine doped tin oxide. Optical constants such as refractive index n, extinction coefficient k and the absorption coefficient of the fto thin films were determined using spectrophotometric measurement of transmittance, absorbance and reflectance in the spectral range.
Nanomechanical and material properties of fluorinedoped tin. Sno2 films have been prepared onto the amorphous glass substrates by a spray pyrolysis. Preparation of fluorine doped tin oxide film by ultrasonic. Thin films of tin oxide sno 2 and fluorine doped tin oxide sno 2. Preparation and characterization of transparent conductive sno2. Transparent conducting films tcfs are thin films of optically transparent and electrically conductive material.
The refractive index,n, showed a considerable decrease 2. During the deposition, the films were deposited at a constant temperature and. The electrical properties of fto films prepared by sol gel remain relatively lower than the. It can be used for lowe glasses, thin film solar cells, displays, etc. Fto coatings were deposited with a thickness of 400 nm on glass substrates. Fluorine doped tin oxide fto thin films were deposited on glass substrates by home built spray pyrolysis setup at 400 5. This works is fo cused on producing high transparency materials above. Fluorine doped tin oxide fto is a possible alternative to ito because fto is inexpensive as well as chemically and thermally stable kim et al. Different parameters like spray angle, source to substrate distance, spray nozzle position, spray rate, carrier gas. The substrate temperature was set to 200 o c, 150 o c and 100 o c for different samples. Transparent and conductive fluorine doped tin oxide thin films fto were deposited on to thoroughly cleaned glass substrates by nebulized spray pyrolysis technique using dihydrated tin ii chloride sncl 2. Motohiro, lowtemperature growth of highly crystallized transparent conductive fluorinedoped tin oxide films by intermittent spray pyrolysis deposition. While indium tin oxide ito is the most widely used, alternatives include widerspectrum transparent conductive oxides tcos, conductive. Tin oxide thin films doped with fluorine, antimony and both have been prepared by spray pyrolysis from sncl precursor.
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